Performance:
With millions of hours in the field, Comdel’s CPS series generators have proven their ability to withstand erratic loads. Patented S-Technology provides optimized amplifier performance for ultra-stable output by reducing power gain changes due to plasma impedance fluctuations. S-Technology helps eliminate headaches from transmission line length, mismatch conditions and process reliability issues.
Applications:
The CPS series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.
Features:
Solid state for long life and low maintenance
Class “C” linear design assures stability
ETL Marked and SEMI F47 compliant
Control circuitry ensures consistency during high VSWR conditions
Output transistors are beta-matched to assure reliability
Broadband, low “Q” circuits inhibit “squeeging” and self-resonant oscillations
CPS 500:
Output power: 500W
Control I/O connector: 15-pin subminiature D type (female)
Input line voltage: 115/200/208/220VAC; single phase; 50/60 Hz; 1KVA max.
Cooling: Forced air
Size: 5.25"H x 19"W x 16"D (13.3cm x 48.3cm x 40.6cm)
